论文信息 - A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection

A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection

This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 µm-thick BCB polymer substrate and then BCB-capped through our new anti-adhesion layer assisted wafer-level transfer technique. Gold electrodes are fabricated on top of the BCB cap for DC actuation. The implemented BCB capped BPF showed the tuning range of 1.49 GHz from 63.36 GHz to 64.85 GHz with the associated insertion losses of −9.7 dB and −9.4 dB and the return losses better than −11 dB over the tuning range.

Nathalie Rolland | Paul-Alain Rolland | Seonho Seok | Janggil Kim

[1] A novel wafer level bonding/debonding technique using an anti-adhesion layer for polymer-based zero-level packaging of RF device , 2010, 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC).

[2] Gabriel M. Rebeiz,et al. High performance microshield line components , 1995 .

[3] G. G. Weidner,et al. Millimeter Wave Phase Shifter , 1973 .

[4] Jun-Fa Mao. Twofold Mur's first-order ABC in the FDTD method , 1998 .

[5] Jia-Sheng Hong,et al. Microstrip filters for RF/microwave applications , 2001 .

[6] Gabriel M. Rebeiz,et al. Distributed MEMS true-time delay phase shifters and wide-band switches , 1998 .

[7] Xun Gong,et al. Widely tunable high-Q evanescent-mode resonators using flexible polymer substrates , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[8] N. Rolland,et al. Packaging methodology for RF devices using a BCB membrane transfer technique , 2006 .

[9] N. Rolland,et al. A theoretical and experimental study of the BCB thin-film cap zero-level package based on FEM simulations , 2010 .

[10] D. Nicholson,et al. A High Performance Hexagonal Ferrite Tunable Bandpass Filter for the 40-60 GHz Region , 1985, 1985 IEEE MTT-S International Microwave Symposium Digest.