Detection of Cl and chlorine‐containing negative ions in rf plasmas by two‐photon laser‐induced fluorescence
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[1] P. Avouris,et al. Laser Optogalvanic Detection of Molecular Ions , 1983 .
[2] R. E. Walkup,et al. Studies of atomic oxygen in O2+CF4 rf discharges by two‐photon laser‐induced fluorescence and optical emission spectroscopy , 1986 .
[3] S. Bashkin,et al. Atomic energy levels and Grotrian diagrams , 1975 .
[4] R. Gottscho,et al. Negative Ion Kinetics in RF Glow Discharges , 1986, IEEE Transactions on Plasma Science.
[5] S. Arepalli,et al. Detection of Cl atoms and HCl molecules by resonantly enhanced multiphoton ionization , 1985 .
[6] J. Bokor,et al. Two-photon absorption, laser-induced fluorescence detection of Cl atoms , 1982 .
[7] G. Woolsey,et al. Discharges in electronegative gases , 1970 .
[8] J. O’Hanlon. A User's Guide to Vacuum Technology , 1980 .
[9] G. Selwyn. Spatially resolved detection of O atoms in etching plasmas by two‐photon laser‐induced fluorescence , 1986 .