Ni-P-CNTs nanocomposite film for MEMS applications

A Ni-P-CNTs (electroless phosphorus nickel-carbon nanotubes) nanocomposite film synthesis and related processes for MEMS device fabrication have been successfully developed and presented in this paper. With a special acid oxidative method, a well-dispersed nickel-CNTs colloidal solution has been produced without any aggregation, very suitable for microstructure fabrication. The nano-indentation measurement indicates that the Young's modulus and hardness of the Ni-P-CNTs nanocomposite film plated in the bath with 0.028 g/L CNTs can greatly increase up to 666 Pa and 29 GPa, respectively, which is four times larger than that of pure nickel. The performance improvement of the electro-thermal microactuator made of the nanocomposite, including device strength and power efficient, have been proved similar to the Ni-diamond composites. With the same power input, the device can provide 4 times elongation longer than that made of pure nickel. The mechanical strength of the actuator can also be enhanced to sustain the input power with two times larger than the pure one.

[1]  P. Pehrsson,et al.  Water-soluble and optically pH-sensitive single-walled carbon nanotubes from surface modification. , 2002, Journal of the American Chemical Society.

[2]  Q. Wang,et al.  Electroless preparation and tribological properties of Ni-P-Carbon nanotube composite coatings under lubricated condition , 2002 .

[3]  Wensyang Hsu,et al.  An electro-thermally and laterally driven polysilicon microactuator , 1997 .

[4]  Nickel nano-composite film for MEMS applications , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[5]  K. Hatakeyama,et al.  Particle size effect on the complex permeability for permalloy composite materials , 1999, IEEE International Magnetics Conference.

[6]  Ryoichi Ichino,et al.  Creation of high strength bonded abrasive wheel with ultrasonic aided composite plating , 2003 .

[7]  G. Palumbo,et al.  Mechanical properties of nickel silicon carbide nanocomposites , 2002 .

[8]  B. Derby,et al.  Silicon carbide particle size effects in alumina-based nanocomposites , 1996 .

[9]  Y. Choa,et al.  Preparation and characterization of metal/ceramic nanoporous nanocomposite powders , 2003 .

[10]  Wensyang Hsu,et al.  Power and reliability improvement of an electro-thermal microactuator using Ni-diamond nanocomposite , 2004, 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No.04CH37546).

[11]  Guo Xiaoxia,et al.  Preparation of asymmetric Ni/ceramic composite membrane by electroless plating , 2001 .

[12]  Charles M. Lieber,et al.  Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes , 1997 .