论文信息 - Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography

Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography

Abstract A ‘Repetitive + PID + feedforward’ control mode is proposed to improve the trajectory-tracking performance of linear motors in wafer stage of lithography. The positioning error of linear motor is decreased greatly compared to PID control and ‘PID + feedforward’ control. The contradiction of high speed and high positioning accuracy has been solved. The results of MATLAB simulation and experiments demonstrated the effectiveness of the proposed methods.

[1] Myung Jin Chung,et al. Design of a repetitive controller: an application to the track-following servo system of optical disk drives , 2006 .

[2] Myung Jin Chung,et al. Repetitive control for the track-following servo system of an optical disk drive , 1998, IEEE Trans. Control. Syst. Technol..

[3] Bruce A. Francis,et al. The internal model principle of control theory , 1976, Autom..

[4] Teng Wei. The Development of Feedforward Plus PID Controller for Linear Motor , 2009 .

[5] Youyi Wang,et al. Track following control design for ODDs by employing repetitive two-degree-of-freedom control scheme , 2003, IEEE Trans. Consumer Electron..