论文信息 - Magnetic levitation-based micro-automation of mechanical processes in semiconductor fabrication

Magnetic levitation-based micro-automation of mechanical processes in semiconductor fabrication

Micro-automation systems that operate through magnetic levitation of a micromanipulator are discussed. Applications of such systems include positioning, probing, and quality control tasks. Tools used in the design of magnetic levitation-based micro-automation systems and results obtained from demonstration systems are given. A review of work in progress is included.<<ETX>>

I. Busch-Vishniac | I.-Y.A. Wang | S. Chen | M. Jeong | S.-H. Li

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