Optimal shape design of an electrostatic comb drive in microelectromechanical systems

Polynomial driving-force comb drives are synthesized using numerical simulation. The electrode shapes are obtained using the indirect boundary element method. Variable-gap comb drives that produce combinations of linear, quadratic, and cubic driving-force profiles are synthesized. This inverse problem is solved by an optimization procedure. Sensitivity analysis is carried out by the direct differentiation approach (DDA) in order to compute design sensitivity coefficients (DSCs) of force profiles with respect to parameters that define the shapes of the fingers of a comb drive. The DSCs are then used to drive iterative optimization procedures. Designs of variable-gap comb drives with linear, quadratic, and cubic driving force profiles are presented in this paper.

[1]  Roger T. Howe,et al.  Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[2]  F. Maseeh,et al.  A virtual prototype manufacturing software system for MEMS , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[3]  M. Brereton.  Classical Electrodynamics (2nd edn) , 1976 .

[4]  G. K. Ananthasuresh,et al.  3D modeling of contact problems and hysteresis in coupled electro-mechanics , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[5]  Edward J. Haug,et al.  Design Sensitivity Analysis of Structural Systems , 1986 .

[6]  J. C. Greenwood,et al.  Integrated Fabrication of Micromechanical Structures on Silicon , 1991 .

[7]  Abhijit Chandra,et al.  Boundary element methods in manufacturing , 1997 .

[8]  S. Senturia,et al.  3D coupled electro-mechanics for MEMS: applications of CoSolve-EM , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[9]  R. J. Zhang,et al.  Turning point solutions for thin shell vibrations , 1991 .

[10]  Zhang Qing,et al.  Design sensitivity coefficients for linear elastic bodies with zones and corners by the derivative boundary element method , 1991 .

[11]  Palghat S. Ramesh,et al.  On the application of 2D potential theory to electrostatic simulation , 1995 .

[12]  Albert P. Pisano,et al.  Polysilicon microgripper , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[13]  William C. Tang,et al.  Electrostatic-comb drive of lateral polysilicon resonators , 1990 .

[14]  Subrata Mukherjee,et al.  Sensitivity analysis and optimal design in charge transport problems , 1994 .

[15]  A. Pisano.  Resonant-structure micromotors , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[16]  S. D. Senturia.  CAD For Microelectromechanical Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[17]  Richard M. White,et al.  Polysilicon microstructures to characterize static friction , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..