A control system for automated multiscale measuring systems

Abstract Quality inspection of micro systems on wafer scale must cope with conflicting demands: nanometer accuracy and high velocity in a comparatively large workspace. An Automated Multiscale Measuring System (AMMS) combines multiple sensors that operate at specific scales by an intelligent measurement strategy in order to balance speed and accuracy. The AMMS demonstrator is based on a modified Mahr MFU 100 with a position and tilt deflection measurement resolution of 1 nm. In this paper multiscale models of a horizontal axis with an operating range of 200 mm and their application to state linearization and control parameterization of the residual dynamics according to multiscale sensor system characteristics are developed and discussed. Main modeling issues are sliding and submicron presliding friction for model-based compensation and control, reaching from submicron positioning to high-velocity trajectory tracking with desired performance. A new experimental design for the identification of presliding friction parameters and a higher-order friction calculator are presented. Experimental results show the effectiveness of this approach.

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