论文信息 - Measured mechanical properties of LIGA Ni structures - 字舞流文

Measured mechanical properties of LIGA Ni structures

H. Cho | G. Dirras | K. Lian | J. Goettert | K. Hemker | H. Cho | Kun Lian

[1] K. Hemker. Microsample tensile testing of LIGA nickel for MEMS applications , 2001 .

[2] Kevin J. Hemker,et al. Development of high-temperature microsample testing , 2001 .

[3] J. Hruby,et al. LIGA Technologies and Applications , 2001 .

[4] Annealing Effects on the Microstructure and Mechanical Properties of Liga Nickel for Mems , 2000 .

[5] T. Christenson,et al. Understanding and Tailoring the Mechanical Properties of LIGA Fabricated Materials , 1999 .

[6] R. L. Edwards,et al. Mechanical properties of LIGA-deposited nickel for MEMS transducers , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[7] Uwe Erb,et al. Effect of porosity on Young's modulus of nanocrystalline materials , 1993 .