Synthesis of Large Area Two-Dimensional MoS2 Films by Sulfurization of Atomic Layer Deposited MoO3 Thin Film for Nanoelectronic Applications
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V. Volkov | A. Chouprik | S. Novikov | A. Chernikova | A. Markeev | M. Kozodaev | R. Khakimov | R. Romanov | A. Slavich | S. S. Zarubin | P. Chizhov | D. I. Myakota | C. Hwang