A method for predicting at least one lighting parameter for evaluating an illumination settings and procedures for optimizing an illumination settings

A method for predicting at least one lighting parameter (p *) for evaluating an illumination settings (j *) for illuminating an object field (18) of a projection exposure apparatus (1) comprising the following steps: 1.1. Providing an illumination optics (23) mit1.1.1. at least one facetted element (6, 10) for generating a plurality of j illumination settings with a plurality of illumination channels i, 1.2. Providing a model to predict a plurality of illumination parameters p as a function of the illumination setting j, 1.3. Calibration of the model durch1.3.1. Providing correction terms (s) for prediction values ​​of a first subset (p) of the illumination parameters 1.3.2. Measuring actual values ​​of the illumination parameters (p) in a number n of Kalibrationssettings (j), 1.3.3. Determining correction terms (f) for prediction values ​​of a second subset (p) of illumination parameters taking into account the measured values ​​1.3.4. Updating the model (s, f) taking into account the correction terms and1.4. Prediction of at least one lighting parameter (p *) of at least one illumination setting (j *), which is not included in the set of n Kalibrationssettings (j), using the updated model.