MOEMs, key optical components for future astronomical instrumentation in space

Based on the micro-electronics fabrication process, MicroOpto-Electro-Mechanical Systems (MOEMS) are under study, in order to be integrated in next-generation astronomical instruments and telescopes, especially for space missions. The main advantages of micro-optical components are their compactness, scalability, specific task customization using elementary building blocks, and they allows remote control. As these systems are easily replicable, the price of the components is decreasing dramatically when their number is increasing. The two major applications of MOEMS are Multi-Object Spectroscopy masks and Deformable Mirror systems.

[1]  Kjetil Dohlen,et al.  Micro-Mirror Array unit-magnification : Multi-Object Spectrograph for NGST , 2000 .

[2]  Michael C. Roggemann,et al.  Optical phase modulation using a refractive lenslet array and microelectromechanical deformable mirror , 1998 .

[3]  Kjetil Dohlen,et al.  Multi-object spectroscopy in space , 1998, Astronomical Telescopes and Instrumentation.

[4]  Larry J. Hornbeck,et al.  Digital Light Processing and MEMS: Timely Convergence for a Bright Future , 2002 .

[5]  K Dohlen,et al.  Surface characterization of micro-optical components by Foucault's knife-edge method: the case of a micromirror array. , 1999, Applied optics.

[6]  Victor M. Bright,et al.  Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results , 1997 .

[7]  Kjetil Dohlen,et al.  Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces , 1999, Optics + Photonics.

[8]  D. Castañón,et al.  Continuous-membrane surface-micromachined silicon deformable mirror , 1997 .

[9]  S. Middelhoek,et al.  Technology and applications of micromachined silicon adaptive mirrors , 1997 .

[10]  Kjetil Dohlen,et al.  Optical designs for the Rosetta narrow‐angle camera , 1996 .

[11]  L. Mertz.  Concentric spectrographs. , 1977, Applied optics.

[12]  Abe Offner,et al.  New Concepts in Projection Mask Aligners , 1975 .

[13]  Thomas G. Bifano,et al.  Adaptive optic correction using silicon-based deformable mirros , 1999, Optics + Photonics.

[14]  Massimo Stiavelli,et al.  Yardstick integrated science instrument module concept for NGST , 1998, Astronomical Telescopes and Instrumentation.