Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

A piezoresistive silicon cantilever-type tactile sensor was described as well as its application for dimensional metrology with high-aspect-ratio micro components and as a transferable force standard in the micro-to-nano Newton range. As an example for micro-/nanoscale tactile probing metrology the novel cantilever sensor was used for surface scanning with calibrated groove and roughness artifacts. Micro-/nano-Newton force metrology using the novel cantilever sensor was addressed with calibration procedures which were developed for low-force stylus instruments as well as for glass micro pipettes designed for the manipulation of isolated living cells.

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