Development of a Built-In Micro-Laser Doppler Velocimeter

Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 μm/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements.

[1]  A. K. Tieu,et al.  Measurements of velocity distributions in the deformation zone in cold rolling by a scanning LDV , 2001 .

[2]  Leopold Schmetterer,et al.  Bidirectional Doppler Fourier-domain optical coherence tomography for measurement of absolute flow velocities in human retinal vessels. , 2008, Optics letters.

[3]  F Kajiya,et al.  Optical-fiber laser Doppler velocimeter for high-resolution measurement of pulsatile blood flows. , 1982, Applied optics.

[4]  Y. Yasuda,et al.  Application of a micro‐multipoint laser doppler velocimeter for in vivo evaluation of subcutaneous blood flow , 2013 .

[5]  Guy Voirin,et al.  One-step 3D shaping using a gray-tone mask for optical and microelectronic applications , 1994 .

[6]  R. J. Goldstein,et al.  Turbulent Flow Measurements Utilizing the Doppler Shift of Scattered Laser Radiation , 1967 .

[7]  Berthold K. P. Horn,et al.  Determining Optical Flow , 1981, Other Conferences.

[8]  M. Shah,et al.  Object tracking: A survey , 2006, CSUR.

[9]  Renshi Sawada,et al.  An integrated laser blood flowmeter , 2003 .

[10]  Y. Yeh,et al.  Localized fluid flow measurements with an He-Ne laser spectrometer , 1964 .

[11]  Hironao Okada,et al.  Development of a Wireless Sensor for the Measurement of Chicken Blood Flow Using the Laser Doppler Blood Flow Meter Technique , 2013, IEEE Transactions on Biomedical Engineering.

[12]  T. Suga,et al.  Low-Temperature Bonding of Laser Diode Chips on Silicon Substrates Using Plasma Activation of Au Films , 2007, IEEE Photonics Technology Letters.

[13]  R. Eils,et al.  Quantitative motion analysis and visualization of cellular structures. , 2003, Methods.

[14]  A. F. Najafi,et al.  Numerical simulations of gas–liquid–solid flows in a hydrocyclone separator , 2009 .

[16]  Jitendra Malik,et al.  Large Displacement Optical Flow: Descriptor Matching in Variational Motion Estimation , 2011, IEEE Transactions on Pattern Analysis and Machine Intelligence.

[17]  Lorenzo Scalise,et al.  Laser Doppler vibrometry based on self-mixing effect , 2002 .

[18]  T. Suga,et al.  Au–Au Surface-Activated Bonding and Its Application to Optical Microsensors With 3-D Structure , 2009, IEEE Journal of Selected Topics in Quantum Electronics.

[19]  William K. George,et al.  Velocity measurements in a high-Reynolds-number, momentum-conserving, axisymmetric, turbulent jet , 1994, Journal of Fluid Mechanics.

[20]  Renshi Sawada,et al.  Highly accurate and quick bonding of a laser-diode chip onto a planar lightwave circuit , 2001 .

[21]  Claude L. Fennema,et al.  Velocity determination in scenes containing several moving objects , 1979 .

[22]  E. R. Pike,et al.  Laser Doppler anemometry , 1974 .

[23]  Renshi Sawada,et al.  Hybrid microlaser encoder , 2003 .

[24]  K. Miura.  Tracking movement in cell biology. , 2005, Advances in biochemical engineering/biotechnology.

[25]  C E Riva,et al.  Bidirectional LDV system for absolute measurement of blood speed in retinal vessels. , 1979, Applied optics.

[26]  Shmuel Einav,et al.  A laser-Doppler velocimetry study of ensemble-averaged characteristics of the turbulent near wake of a square cylinder , 1995, Journal of Fluid Mechanics.

[27]  Renshi Sawada,et al.  Optical micro sensors integration and application , 2014, IEEE CPMT Symposium Japan 2014.

[28]  T. Itoh,et al.  Surface activated bonding for new flip chip and bumpless interconnect systems , 2002, 52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345).