Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepared by radio frequency (RF) magnetron sputtering. The composition, chemical structure, surface morphology, and thickness of the LZO thin film were analyzed. In order to study the effect of double piezoelectric layers on the sensitivity of the acceleration sensor, we designed two structural models (single and double piezoelectric layers) and fabricated them by using micro-electro-mechanical system (MEMS) technology. The test results show that the resonance frequency of the acceleration sensor was 1363 Hz. The sensitivity of the double piezoelectric layer was 33.1 mV/g, which is higher than the 26.1 mV/g of single piezoelectric layer sensitivity, both at a resonance frequency of 1363 Hz.

[1]  D. Gonbeau,et al.  Systematic XPS studies of metal oxides, hydroxides and peroxides , 2000 .

[2]  E. Katz,et al.  Nanoparticle arrays on surfaces for electronic, optical, and sensor applications. , 2000, Chemphyschem : a European journal of chemical physics and physical chemistry.

[3]  I. Aksay,et al.  Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers , 2001 .

[4]  Young Ran Park,et al.  Large and abrupt optical band gap variation in In-doped ZnO , 2001 .

[5]  Jun Yuan,et al.  Control of p- and n-type conductivities in Li-doped ZnO thin films , 2006 .

[6]  E. S. Kim,et al.  Single- and Triaxis Piezoelectric-Bimorph Accelerometers , 2008, Journal of Microelectromechanical Systems.

[7]  Shekhar Bhansali,et al.  Reinforced piezoresistive pressure sensor for ocean depth measurements , 2008 .

[8]  S. Jeong,et al.  Study on the doping effect of Li-doped ZnO film , 2008 .

[9]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[10]  S. H. Kim,et al.  Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting , 2009 .

[11]  K. Itaya,et al.  Optimization of Deposition Process and Microscopic Characterization of Highly Oriented Aluminum Nitride Thin Films for Bimorph Structures of Piezoelectric Tunable Capacitors , 2009 .

[12]  J. Garrett,et al.  Optimization and Characterization of Lithium Ion Cathode Materials in the System (1 – x – y)LiNi 0.8 Co 0.2 O 2 • xLi 2 MnO 3 • yLiCoO 2 , 2010 .

[13]  Andrew G. Dempster,et al.  Attitude determination by integration of MEMS inertial sensors and GPS for autonomous agriculture applications , 2011, GPS Solutions.

[14]  S. Reynaud,et al.  Electrostatic accelerometer with bias rejection for Gravitation and Solar System physics , 2010, 1011.6263.

[15]  S. Joshi,et al.  A novel gas flow sensing application using piezoelectric ZnO thin films deposited on Phynox alloy , 2012 .

[16]  Qingliang Liao,et al.  Scanning Probe Study on the Piezotronic Effect in ZnO Nanomaterials and Nanodevices , 2012, Advanced materials.

[17]  B.H.W. te Lindert,et al.  Sleep estimates using microelectromechanical systems (MEMS). , 2013 .

[18]  S. Thapa,et al.  Positron annihilation studies of vacancy-type defects and room temperature ferromagnetism in chemically synthesized Li-doped ZnO nanocrystals , 2014 .

[19]  Zhong Lin Wang.  Triboelectric nanogenerators as new energy technology and self-powered sensors - principles, problems and perspectives. , 2014, Faraday discussions.

[20]  I. Hung,et al.  Effect of different concentration Li-doping on the morphology, defect and photovoltaic performance of Li–ZnO nanofibers in the dye-sensitized solar cells , 2014 .

[21]  Manoj Gupta,et al.  Self‐Compensated Insulating ZnO‐Based Piezoelectric Nanogenerators , 2014 .

[22]  H. Du,et al.  Development of high sensitivity, large frequency bandwidth ZnO-based accelerometers , 2015 .

[23]  Shaohua Shen,et al.  N Doping to ZnO Nanorods for Photoelectrochemical Water Splitting under Visible Light: Engineered Impurity Distribution and Terraced Band Structure , 2015, Scientific Reports.

[24]  Hyun Chan Kim,et al.  Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests , 2016, Sensors.

[25]  Jie Xiong,et al.  Lattice Strain Induced Remarkable Enhancement in Piezoelectric Performance of ZnO-Based Flexible Nanogenerators. , 2016, ACS applied materials & interfaces.

[26]  Yong-ning He,et al.  A ZnO-Based Programmable UV Detection Integrated Circuit Unit , 2016, IEEE Sensors Journal.

[27]  Roozbeh Jafari,et al.  Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer , 2016, IEEE Sensors Journal.

[28]  Rumen Yordanov,et al.  Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors , 2016 .

[29]  Bhaskaran Prathish Raaja,et al.  A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications , 2017 .

[30]  Donald P. Butler,et al.  Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA , 2017 .

[31]  G. Xiao,et al.  High-efficiency and low-cost Li/ZnO catalysts for synthesis of glycerol carbonate from glycerol transesterification: The role of Li and ZnO interaction , 2017 .

[32]  Resistive Switching Characteristics of Hydrogen Peroxide Surface Oxidized ZnO-Based Transparent Resistive Memory Devices , 2017 .

[33]  Han‐Ki Kim,et al.  Li-doped Cu2O/ZnO heterojunction for flexible and semi-transparent piezoelectric nanogenerators , 2017 .

[34]  K. Maenaka,et al.  Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting , 2018, Sensors and Actuators A: Physical.

[35]  Yunbo Shi,et al.  Design, fabrication and calibration of a high-G MEMS accelerometer , 2018, Sensors and Actuators A: Physical.

[36]  Marco Amabili,et al.  A Paper-Based Piezoelectric Accelerometer , 2018, Micromachines.

[37]  S. Radha,et al.  Experimental study on structural, optoelectronic and room temperature sensing performance of Nickel doped ZnO based ethanol sensors , 2018 .

[38]  T. Ohno,et al.  Neutral Oxygen Beam Treated ZnO-Based Resistive Switching Memory Device , 2018, ACS Applied Electronic Materials.

[39]  Dianzhong Wen,et al.  Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films , 2018, Micromachines.

[40]  A. L. Gesing,et al.  On the design of a MEMS piezoelectric accelerometer coupled to the middle ear as an implantable sensor for hearing devices , 2018, Scientific Reports.

[41]  Bahram Azizollah Ganji,et al.  Design and modeling of a novel high sensitive MEMS piezoelectric vector hydrophone , 2018 .

[42]  Dianzhong Wen,et al.  Resistive Switching Characteristics of Li-Doped ZnO Thin Films Based on Magnetron Sputtering , 2019, Materials.

[43]  Jie Li,et al.  A Novel Rotation Scheme for MEMS IMU Error Mitigation Based on a Missile-Borne Rotation Semi-Strapdown Inertial Navigation System , 2019, Sensors.

[44]  Dianzhong Wen,et al.  Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology , 2019, Micromachines.

[45]  Aifang Yu,et al.  Flexible Li-doped ZnO piezotronic transistor array for in-plane strain mapping , 2019, Nano Energy.