论文信息 - Quantification of germanium and boron in heterostructures Si/Si1−xGex/Si by SIMS - 字舞流文

Quantification of germanium and boron in heterostructures Si/Si1−xGex/Si by SIMS

B. Gautier | G. Brémond | C. Dubois | R. Brenier | M. Bonneau | G. Prudon | J. Dupuy | J. Vallard | J. Delmas