Reactive chemicals and combustible materials have led to numerous losses in semiconductor industry in Taiwan. Fifty nine incidents were collected and analyzed on related information to provide the integrated overviews of such events in the past thirteen years. Various types of factories either in the upstream or downstream of semiconductor industry were reviewed to deduce which kind of plant is feasible to possesses the higher risk of occurrence. Different kinds of chemicals or processes were compared with each other to verify the causes which led to the higher or largest loss already happened. Accidental fires caused by silane or flammable vapors are the dominant types of incidents in the semiconductor plant in comparison to any other types of materials. Besides, explosions, release of hazardous chemicals, and injuries by hazardous or corrosive chemicals are the three kinds of most common incidents encountered. Fire spread from the common exhaust duct or relief header always resulted in the largest loss among the reported events. The most serious lesson learnt from these losses was about three hundred million US dollars.