FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices

Lately, wearable applications featuring photonic on-chip sensors are on the rise. Among many ways of controlling and/or modulating, the acousto-optic technique is seen to be a popular technique. This paper undertakes the study of different multilayer structures that can be fabricated for realizing an acousto-optic device, the objective being to obtain a high acousto-optic figure of merit (AOFM). By varying the thicknesses of the layers of these materials, several properties are discussed. The study shows that the multilayer thin film structure-based devices can give a high value of electromechanical coupling coefficient (k2) and a high AOFM as compared to the bulk piezoelectric/optical materials. The study is conducted to find the optimal normalised thickness of the multilayer structures with a material possessing the best optical and piezoelectric properties for fabricating acousto-optic devices. Based on simulations and studies of SAW propagation characteristics such as the electromechanical coupling coefficient (k2) and phase velocity (v), the acousto-optic figure of merit is calculated. The maximum value of the acousto-optic figure of merit achieved is higher than the AOFM of all the individual materials used in these layer structures. The suggested SAW device has potential application in wearable and small footprint acousto-optic devices and gives better results than those made with bulk piezoelectric materials.

[1]  Zhiping He,et al.  Applications of AOTF Spectrometers in In Situ Lunar Measurements , 2021, Materials.

[2]  Zongyin Yang,et al.  Miniaturization of optical spectrometers , 2021, Science.

[3]  Dechao Yang,et al.  Piezoelectric property comparison of two-dimensional ZnO nanostructures for energy harvesting devices , 2021, RSC advances.

[4]  H. Yin,et al.  Piezoelectric potential enhanced photocatalytic performance based on ZnO with different nanostructures , 2020, Nanotechnology.

[5]  H. Duan,et al.  Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments , 2020, RSC advances.

[6]  M. Heck,et al.  Opportunities for photonic integrated circuits in optical gas sensors , 2020, Journal of Physics: Photonics.

[7]  A. Zadok,et al.  Surface acoustic wave photonic devices in silicon on insulator , 2019, Nature Communications.

[8]  Pascual Muñoz,et al.  Integrated Optic Sensing Spectrometer: Concept and Design , 2019, Sensors.

[9]  M. M. de Lima,et al.  Semiconductor optical waveguide devices modulated by surface acoustic waves , 2018, Journal of Physics D: Applied Physics.

[10]  K. Boller,et al.  Surface acoustic waves for acousto-optic modulation in buried silicon nitride waveguides. , 2017, Optics express.

[11]  Haike Zhu,et al.  Silicon Photonics Based System-On-Chip Gas Sensor , 2018 .

[12]  M. Z. Aslam,et al.  FEM Simulation Analysis of AlN/SiO2/Si Multilayer Structure and Effect of IDT Configuration on SAW Propagation Modes and Characteristics , 2018, 2018 International Conference on Intelligent and Advanced System (ICIAS).

[13]  Asif Iqbal,et al.  FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure , 2018, Sensors.

[14]  G. Ganesh,et al.  Development and integration of an AOTF based NIR spectrophotometer , 2018 .

[15]  Effect of AlN layer on the resistive switching properties of TiO2 based ReRAM memory devices , 2018 .

[16]  S. Adhikari,et al.  Effective mechanical properties of multilayer nano-heterostructures , 2017, Scientific Reports.

[17]  Nam-Trung Nguyen,et al.  Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications , 2017 .

[18]  John Juneau.  The Simulation, Design, and Fabrication of Optical Filters , 2017 .

[19]  K. Nagashima,et al.  THz pulse generation using a contact grating device composed of TiO2/SiO2 thin films on LiNbO3 crystal , 2016 .

[20]  Varun Jeoti,et al.  Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si , 2016, International Conference on Intelligent and Advanced Systems.

[21]  Chuan Li,et al.  The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures , 2016, Sensors.

[22]  A. Mir,et al.  FEM simulation of AlN thin layers on diamond substrates for high frequency SAW devices , 2016 .

[23]  M. Stuckelberger,et al.  Recent advances and remaining challenges in thin-film silicon photovoltaic technology , 2015 .

[24]  B. Lessard,et al.  Phthalocyanine-Based Organic Thin-Film Transistors: A Review of Recent Advances. , 2015, ACS Applied Materials and Interfaces.

[25]  O. Korablev,et al.  Wide-aperture TeO₂ AOTF at low temperatures: operation and survival. , 2015, Ultrasonics.

[26]  Y. Aoura,et al.  FEM simulation of Rayleigh waves for SAW devices based on ZnO/AlN/Si , 2015 .

[27]  Christian Wenger,et al.  AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss , 2015, IEEE Transactions on Electron Devices.

[28]  Acousto-optic Figure of Merit Search☆ , 2015 .

[29]  M. Fernandes.  Acousto-Optic Effect and Its use in Signal Processing , 2015 .

[30]  C. Maghanga,et al.  Optical Properties of TiO 2 Based Multilayer Thin Films: Application to Optical Filters. , 2015 .

[31]  Yanrong Li,et al.  Microstructure and memory characteristics of ferroelectric LiNbO3/ZnO composite thin films on Pt/TiO2/SiO2/Si substrates , 2014 .

[32]  Christian Wenger,et al.  FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO₂/Si(100). , 2014, Ultrasonics.

[33]  Md. Shabiul Islam,et al.  Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors , 2013, Sensors.

[34]  Zhiyu Wen,et al.  Investigation of surface acoustic waves propagating in ZnO-SiO2-Si multilayer structure. , 2013, Ultrasonics.

[35]  Ruyan Guo,et al.  Finite element modeling of acousto-optic effect and optimization of the figure of merit , 2012, Other Conferences.

[36]  Jan Kischkat,et al.  Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride. , 2012, Applied optics.

[37]  I. M. Dharmadasa.  Advances in Thin-Film Solar Cells , 2012 .

[38]  C. Cao,et al.  Electronic, elastic, optical properties of rutile TiO2 under pressure: A DFT study , 2012 .

[39]  M. Ghoranneviss,et al.  Deposition of ZnO multilayer on LiNbO3 single crystals by DC-magnetron sputtering , 2011 .

[40]  Adam L. Washburn,et al.  Photonics-on-a-chip: recent advances in integrated waveguides as enabling detection elements for real-world, lab-on-a-chip biosensing applications. , 2011, The Analyst.

[41]  Paul Muralt,et al.  Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting , 2009 .

[42]  Laura M. Lechuga,et al.  Silicon Photonic Biosensors for Lab-on-a-Chip Applications , 2008 .

[43]  Jon Ward,et al.  A novel acousto-optic tunable filter for use in hyperspectral imaging systems , 2008, SPIE OPTO.

[44]  M. Shur,et al.  Surface acoustic wave velocity in single-crystal AlN substrates , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[45]  E. Verona,et al.  Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[46]  Robert E. Newnham,et al.  Properties of Materials: Anisotropy, Symmetry, Structure , 2005 .

[47]  M. Mirsalehi,et al.  MULTILAYER THIN-FILM OPTICAL FILTERS: DESIGN, FABRICATION, AND APPLICATIONS , 2004 .

[48]  Optical interactions in ZnO-TeO/sub 2/ bi-layer for AO device applications , 2003, IEEE Symposium on Ultrasonics, 2003.

[49]  Wojtek Wlodarski,et al.  Comparison of layered based SAW sensors , 2003 .

[50]  U. Langer,et al.  Finite element simulation of bulk- and surface acoustic wave (SAW) interaction in SAW devices , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[51]  Oliver Brandt,et al.  Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates , 2002 .

[52]  S. Davydov.  Evaluation of physical parameters for the group III nitrates: BN, AlN, GaN, and InN , 2002 .

[53]  G. Georgiev,et al.  Spectral characterization of acousto-optic filters used in imaging spectroscopy. , 2002, Applied optics.

[54]  Yook-Kong Yong.  Analysis of periodic structures for BAW and SAW resonators , 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).

[55]  A. Mansingh,et al.  Thin film layered structure for acousto-optic devices , 1992 .

[56]  R. Dill,et al.  FEM analysis of the reflection coefficient of SAWs in an infinite periodic array , 1991, IEEE 1991 Ultrasonics Symposium,.

[57]  T. Gaylord,et al.  Lithium niobate: Summary of physical properties and crystal structure , 1985 .

[58]  I. C. Chang,et al.  Tunable Acousto-Optic Filters: An Overview , 1976, Optics & Photonics.