A virtual prototype manufacturing software system for MEMS

In this paper we report on developments on a computer-aided design software system (IntelliCAD) for prototype development of microelectromechanical systems. The system is designed to fill gaps in micro-manufacturing know-how by linking performance modeling to manufacturing (machine) parameters. The architecture is self-contained, completely integrated and allows modification for user applications. IntelliCAD's integration is accomplished by an architecture different from a previously reported academic system (1990). The architecture has integrated mask layout, a material database, a fabrication database, process simulation, backward process parameter optimization at each fabrication step, a process debugger, a 3D solid modeler, and parametric electrostatic, mechanical, thermomechanical and electro-mechanical analysis.