Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier

Accurate position control of a moving stage is achieved by employing a piezoelectric actuator associated with a multi-flexure-hinge based displacement amplifier. The principal design parameters of the amplifier are optimally determined, and its static analysis is undertaken through finite element analysis. An appropriate size amplifier is made and its performance characteristics, such as the amplification ratio, are experimentally evaluated. The amplifier is integrated with a piezostack actuator to produce a desirable working distance of the moving stage. A control system based on the Preisach model with a feed-forward compensator and a PID feedback controller is then formulated, for achieving accurate positioning of the moving stage. The feed-forward compensator is designed using the first-order descending hysteresis curves of the piezoactuator, while the PID feedback controller is designed using the signal of the error between desired and actual positions. The control system is empirically realized and control results such as the step response and sinusoidal position tracking response are evaluated in time and frequency domains.

[1]  Tatsuo Harada,et al.  Precision X-Y stage with a Piezodriven fine-table , 1988 .

[2]  J. Paros.  How to design flexure hinges , 1965 .

[3]  Jeong-Du Kim,et al.  An improvement of positioning accuracy by use of piezoelectric voltage in piezoelectric driven micropositioning system simulation , 1995 .

[4]  Wei Xu,et al.  Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations , 1996 .

[5]  Y. Hirata,et al.  Positioning table with high accuracy and high speed , 1990 .

[6]  Young-Pil Park,et al.  Position tracking control of an optical pick-up device using piezoceramic actuator , 2001 .

[7]  Ping Ge,et al.  Tracking control of a piezoceramic actuator , 1996, IEEE Trans. Control. Syst. Technol..

[8]  Jordi Ortín,et al.  Preisach modeling of hysteresis for a pseudoelastic Cu-Zn-Al single crystal , 1992 .

[9]  Michio Takahashi,et al.  Study of precision positioning by friction drive (2nd report): Trapezoidal velocity control , 1989 .

[10]  Musa Jouaneh,et al.  Design and characterization of a low-profile micropositioning stage , 1996 .

[11]  K. Terada,et al.  A Magnifying Mechanism for Use on Piezo-Driven Mechanisms. , 1991 .

[12]  I. Mayergoyz,et al.  On numerical implementation of hysteresis models , 1985 .

[13]  Musa Jouaneh,et al.  Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators , 1997 .

[14]  J. M. Paros,et al.  Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .

[15]  Seung-Bok Choi,et al.  Hysteresis identification of polymethylaniline-based ER fluid using Preisach model , 2003 .