论文信息 - Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization - 字舞流文

Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization

Appala Raju Kanakala | K. Srinivasa Rao | K. Sravani | K. Guha | L. Thalluri | P. B. Babu | K. G. Sravani | G. H. Prasad | K. Sastry | KOUSHIK GUHA