Anomalous Gate-Edge Leakage Current in nMOSFETs Caused by Encroached Growth of Nickel Silicide and Its Suppression by Confinement of Silicidation Region Using Advanced $\hbox{Si}^{+}$ Ion-Implantation Technique
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K. Asai | T. Okudaira | J. Tsuchimoto | K. Maekawa | M. Yoneda | K. Kashihara | T. Yamaguchi | T. Tsutsumi | N. Murata