论文信息 - A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing - 字舞流文

A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

I. Rendina | F. D. Della Corte | L. Moretti | I. Rea | L. Rotiroti | L. de Stefano | K. Malecki