论文信息 - A new method to determine the energy range for the FOCAL technique

A new method to determine the energy range for the FOCAL technique

An effective and simple method to determine the energy range of FOCAL is described in this paper. Relationship between the chop line width and defocus is analyzed. Simulated curves of the chop line width versus defocus are obtained by PROLITH. By choosing the curves which satisfy certain conditions, the energy range of FOCAL is determined off line. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, PEB temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

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