论文信息 - Atomic layer deposition of Y2O3 films using heteroleptic liquid (iPrCp)2Y(iPr-amd) precursor - 字舞流文

Atomic layer deposition of Y2O3 films using heteroleptic liquid (iPrCp)2Y(iPr-amd) precursor

Clément Lansalot-Matras | Y. Jung | Jinho Ahn | I. Park | Wontae Noh | S. Seong | Jiehun Kang