A planar 3-DOF nanopositioning platform with large magnification

Abstract Piezo-actuated flexure-based precision positioning platforms have been widely used in micro/nano manipulation. A conventional major challenge is the trade-off between high rigidity, large magnification, high-precision tracking, and high-accuracy positioning. A compact planar three-degrees-of-freedom (3-DOF) nanopositioning platform is described in which three two-level lever amplifiers are arranged symmetrically to achieve large magnification. The parallel-kinematic configuration with optimised sizes increases the rigidity. Displacement loss models (DLM) are proposed for the external preload port of the actuator, the input port of the platform and the flexible lever mechanism. The kinematic and dynamic modelling accuracies are improved by the compensation afforded by the three DLMs. Experimental results validate the proposed design and modelling methods. The proposed platform possesses high rigidity, large magnification, high-precision circle tracking and high-accuracy positioning.

[1]  D. Gweon,et al.  Development of a compact and long range XYθ(z) nano-positioning stage. , 2012, The Review of scientific instruments.

[2]  S O R Moheimani,et al.  Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues. , 2012, The Review of scientific instruments.

[3]  Farhad Tahmasebi.  Kinematics of a New High-Precision Three-Degree-of-Freedom Parallel Manipulator , 2007 .

[4]  Tien-Fu Lu,et al.  Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator , 2004, SPIE Micro + Nano Materials, Devices, and Applications.

[5]  E. C. Teague,et al.  Piezodriven 50‐μm range stage with subnanometer resolution , 1978 .

[6]  Gijs J M Krijnen,et al.  Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator , 2010, Journal of Microelectromechanical Systems.

[7]  Yuen Kuan Yong,et al.  Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning , 2009, IEEE Transactions on Nanotechnology.

[8]  Makoto Mizuno,et al.  Displacement amplification and reduction by means of linkage. , 1990 .

[9]  Cheng Fan,et al.  Lensless true-color rainbow hologram with He-Ne laser , 1990, Other Conferences.

[10]  Kee S. Moon,et al.  Optimal design of a flexure hinge based XYφ wafer stage , 1997 .

[11]  Bijan Shirinzadeh,et al.  Design and Kinematics Modeling of a Novel 3-DOF Monolithic Manipulator Featuring Improved Scott-Russell Mechanisms , 2013 .

[12]  Donghyun Hwang,et al.  Note: Design of a novel ultraprecision in-plane XYθ positioning stage. , 2011, The Review of scientific instruments.

[13]  Bijan Shirinzadeh,et al.  Design and analysis of a novel flexure-based 3-DOF mechanism , 2014 .

[14]  Yanling Tian,et al.  Design and forward kinematics of the compliant micro-manipulator with lever mechanisms , 2009 .

[15]  Xin-Jun Liu,et al.  A new methodology for optimal kinematic design of parallel mechanisms , 2007 .

[16]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[17]  C. Gosselin,et al.  The optimum kinematic design of a spherical three-degree-of-freedom parallel manipulator , 1988 .

[18]  B. Shirinzadeh,et al.  Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation , 2010 .

[19]  Shuo-Hung Chang,et al.  An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance , 1999 .

[20]  Reinder Banning,et al.  Modeling piezoelectric actuators , 2000 .

[21]  Woo Chun Choi,et al.  Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism , 2005 .

[22]  Kee S. Moon,et al.  Inverse kinematic modeling of a coupled flexure hinge mechanism , 1999 .

[23]  Bijan Shirinzadeh,et al.  Design and Computational Optimization of a Decoupled 2-DOF Monolithic Mechanism , 2014, IEEE/ASME Transactions on Mechatronics.

[24]  Zhou Qinghua,et al.  Displacement loss of flexure-hinged amplifying mechanism , 2006, The Proceedings of the Multiconference on "Computational Engineering in Systems Applications".

[25]  Tien-Fu Lu,et al.  KINETOSTATIC MODELING OF 3-RRR COMPLIANT MICRO-MOTION STAGES WITH FLEXURE HINGES , 2009 .

[26]  Stuart T. Smith,et al.  Design and control for an electromagnetically driven X–Y–θ stage , 2002 .

[27]  Yangmin Li,et al.  Design, Analysis, and Test of a Novel 2-DOF Nanopositioning System Driven by Dual Mode , 2013, IEEE Transactions on Robotics.

[28]  Yangmin Li,et al.  Optimal design of the lever displacement amplifiers for a flexure-based dual-mode motion stage , 2012, 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM).

[29]  Nicolae Lobontiu,et al.  Compliant Mechanisms: Design of Flexure Hinges , 2002 .

[30]  Xianmin Zhang,et al.  Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage , 2008 .

[31]  Jun Wu,et al.  Performance comparison of three planar 3-DOF parallel manipulators with 4-RRR, 3-RRR and 2-RRR structures , 2010 .

[32]  Musa Jouaneh,et al.  Modeling of flexure-hinge type lever mechanisms , 2003 .

[33]  Shuo-Hung Chang,et al.  A precision piezodriven micropositioner mechanism with large travel range , 1998 .

[34]  Tien-Fu Lu,et al.  Review of circular flexure hinge design equations and derivation of empirical formulations , 2008 .

[35]  Yan Liang Zhang,et al.  A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope , 2013, IEEE/ASME Transactions on Mechatronics.