Development of meso-scale machine tool (mMT) systems

This paper addresses the development of meso-scale machine tool (mMT) systems, motivated by the need of achieving high accuracy and process efficiency. The rationale for machine tool miniaturization is described first followed by the description of the design of initial experimental testbeds that physically demonstrate the feasibility of the mMT concept. The testbeds utilize high-speed miniature spindles that are required to obtain appropriate cutting velocities for the efficient cutting of metals. The use of voice-coil actuated and piezoelectric feed drive technologies is also discussed. The mMTs are instrumented with load cells that collect force data for experimentation on micromachining processes. Three-dimensional features are machined on one of the testbeds and cutting force data, surface finish data, and machined feature profiles are presented.