Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis

[1]  Zhenyu Zhang,et al.  A novel slurry for chemical mechanical polishing of single crystal diamond , 2021 .

[2]  Yinchan Zhang,et al.  Effect of ZnO-SiO2 Composite Abrasive on Sapphire Polishing Performance and Mechanism Analysis , 2021, ECS Journal of Solid State Science and Technology.

[3]  Zhenyu Zhang,et al.  Novel rotary chemical mechanical polishing on an integral impeller , 2021 .

[4]  Guofeng Pan,et al.  Exploring combined effect of nitrilotriacetic acid and inhibitor on copper surface in alkaline solution: Insights from experiments and molecular dynamics simulation studies , 2021 .

[5]  Guofeng Pan,et al.  Experimental and density functional theory study of complexing agents on cobalt dissolution in alkaline solutions , 2021 .

[6]  Zhenyu Zhang,et al.  Chemical mechanical polishing for sapphire wafers using a developed slurry , 2021 .

[7]  J. Yuan,et al.  Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing , 2020, Applied Sciences.

[8]  J. Liu,et al.  Green chemical mechanical polishing of sapphire wafers using a novel slurry. , 2020, Nanoscale.

[9]  Jiakai Zhou,et al.  Effect of Potassium Persulfate as an Additive On Chemical Mechanical Polishing Performance on C-, A- and R-Plane Sapphire , 2020 .

[10]  Kaili Xu,et al.  Using sodium D-gluconate to suppress hydrogen production in wet aluminium waste dust collection systems. , 2020, Journal of hazardous materials.

[11]  Zhongwei Hu,et al.  Material removal mechanism of sapphire substrates with four crystal orientations by double-sided planetary grinding , 2020 .

[12]  D. Guo,et al.  Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy , 2020 .

[13]  Z. Wang,et al.  Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI , 2020 .

[14]  G. Cheng,et al.  Crystalline orientation effects on material removal of sapphire by femtosecond laser irradiation , 2019 .

[15]  Jiakai Zhou,et al.  Effect of Chloride Ions on the Chemical Mechanical Planarization Efficiency of Sapphire Substrate , 2019, ECS Journal of Solid State Science and Technology.

[16]  Sunanda Paul,et al.  The prediction and theoretical study for chemical reactivity, thermophysical and biological activity of morpholinium nitrate and nitrite ionic liquid crystals: A DFT study , 2019, Advanced Journal of Chemistry-Section A.

[17]  D. Guo,et al.  Environment friendly chemical mechanical polishing of copper , 2019, Applied Surface Science.

[18]  Xinhuan Niu,et al.  Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate , 2018, Ceramics International.

[19]  E. Uhlmann,et al.  A new process design for manufacturing sapphire wafers , 2018, Precision Engineering.

[20]  M. Nowak,et al.  Carboxyl groups of citric acid in the process of complex formation with bivalent and trivalent metal ions in biological systems. , 2018, Journal of inorganic biochemistry.

[21]  Jianchao Wang,et al.  Effect of a pH Regulator on Sapphire Substrate CMP , 2017 .

[22]  Hyunjae Lee,et al.  Novel in situ self-separation of a 2 in. free-standing m-plane GaN wafer from an m-plane sapphire substrate by HCl chemical reaction etching in hydride vapor-phase epitaxy , 2016 .

[23]  L. Guo,et al.  Highly efficient and reliable high power LEDs with patterned sapphire substrate and strip-shaped distributed current blocking layer , 2015 .

[24]  Gaihuan Yuan,et al.  Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces , 2014 .

[25]  T. Hirajima,et al.  One-step synthesis of layered double hydroxide-intercalated gluconate for removal of borate , 2014 .

[26]  P. Forgó,et al.  Complexation of Al(III) with gluconate in alkaline to hyperalkaline solutions: formation, stability and structure. , 2013, Dalton transactions.

[27]  Xiaodong He,et al.  Preparation, quality characterization, service performance evaluation and its modification of sapphire crystal for optical window and dome application , 2010 .

[28]  M. Hussein,et al.  LDH-intercalated d-gluconate: Generation of a new food additive-inorganic nanohybrid compound , 2009 .

[29]  Yiping Zeng,et al.  Improvement of the performance of GaN-based LEDs grown on sapphire substrates patterned by wet and ICP etching , 2008 .

[30]  R. Sabia,et al.  Chemical mechanical polishing (CMP) anisotropy in sapphire , 2004 .

[31]  A. Martell,et al.  COMPLEXES OF ALUMINUM(III) WITH HYDROXY CARBOXYLIC ACIDS , 1984 .

[32]  A. G. Hills.  pH and the Henderson-Hasselbalch equation. , 1973, The American journal of medicine.

[33]  Bin Wu,et al.  A review: green chemical mechanical polishing for metals and brittle wafers , 2021, Journal of Physics D: Applied Physics.

[34]  Dongming Guo,et al.  A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry , 2018 .

[35]  Da Yin,et al.  Role of a New Type Chelating Agent in Chemical Mechanical Polishing of R-Plane Sapphire Substrate , 2017 .

[36]  Yadong Gong,et al.  Grinding forces in micro slot-grinding (MSG) of single crystal sapphire , 2017 .

[37]  Weili Liu,et al.  The Effect of pH on Sapphire Chemical Mechanical Polishing , 2015 .

[38]  X. Gong,et al.  Molecular dynamics simulation of interaction between benzotriazoles and cuprous oxide crystal , 2011 .