Design and Analysis of a Large-Range Flexure-based Parallel Mechanism Based on Matrix Method

This paper proposes a novel 3-Degree of Freedom (DOF) planar Flexure-based Parallel Mechanism (FPM) with a large motion range about $\pm \mathbf{2}.\mathbf{5}\mathbf{mm}\times\pm \mathbf{2}.\mathbf{5}\mathbf{mm}\times\pm \mathbf{2}.\mathbf{5}^{\circ}$. Three different joints based on compliant four-bar mechanism are selected to construct Prismatic-Prismatic-Revolute (PPR) configuration. With the characteristic of deterministic motion, the Compound Basic Parallelogram Mechanism (CBPM) and Double Blade Rotary Pivot (DBRP) are served as the passive prismatic and revolute joints respectively to eliminate the coupling between joints. The compliance matrix of the compliant four-bar mechanism are derived with matrix method. The output and input compliance matrices of the proposed FPM are thereby achieved based on modularization approach. Finite-Element Analysis (FEA) and preliminary experiments are implemented. And the results validate the correctness of the developed model and feasibility of the design.