Fabrication and basic characteristics of dyr-etched micro inductions

Thin-film meander inductors having 10/sup -6/-m-range coil spacing were fabricated successfully by a dry-etching technique. The inductance measured with a microstrip line increased with coil spacing due to dielectric coupling between the meander lines. The maximum value of the applicable current density was examined, and it was clarified that magnetic thin films are required to provide high saturation magnetization in order to remain in the undersaturated region in case of high current density applications. It is concluded that these results provide a basis for developing thin-film micro inductors and transformers. >