论文信息 - Polarization-insensitive PECVD SiC waveguides for photonic sensing

Polarization-insensitive PECVD SiC waveguides for photonic sensing

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully used in power splitters and cantilivers. These first devices open the way for photonic sensing in harsh environment using SiC.

[1] Francesco G. Della Corte,et al. Digital optical switch based on amorphous silicon waveguide , 2003, SPIE Microtechnologies.

[2] K. Mogensen,et al. Integration of polymer waveguides for optical detection in microfabricated chemical analysis systems. , 2003, Applied optics.

[3] Joseph Zyss,et al. Single-mode TE00-TM00 optical waveguides on SU-8 polymer , 2004 .

[4] R. Soref,et al. Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/ , 1991 .

[5] R.G. Heideman,et al. Realization and characterization of a four-channel integrated optical Young interferometer , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[7] A. Evans,et al. β-SiC-on insulator waveguide structures for modulators and sensor systems , 2000 .

[8] P. Prucnal,et al. Low-loss silicon carbide optical waveguides for silicon-based optoelectronic devices , 1993, IEEE Photonics Technology Letters.

[9] M. Smit,et al. A compact integrated InP-based single-phasar optical crossconnect , 1998, IEEE Photonics Technology Letters.

[10] Michael G. Spencer,et al. Optical waveguide formed by cubic silicon carbide on sapphire substrates , 1991 .