Mobility Modulation Technology Impact on Device Performance and Reliability for sub-90nm SOI CMOSFETs

Reliability for <100> sub-90nm SOI CMOSFETs Chieh-Ming Lai, Chien-Ting Lin, Wen-Kuan Yeh, Yean-Kuen Fang , W. T. Shiau 1. Institute of Microelectronics, National Cheng Kung University, Taiwan. 2. Department of Electrical Engineering, National University of Kaohsiung, Taiwan. 3. United Microelectronics Corporation, Central R&D Division No. 1 University Road, Tainan, TAIWAN, 70101, Tel: 886-6-2080398, FAX: +886-6-2345482 e-mail: ykfang@eembox.ee.ncku.edu.tw