DAMPING CHARACTERISTICS OF BEAM-SHAPED MICRO-OSCILLATORS

[1]  Kiyoshi Itao,et al.  Energy loss of a cantilever vibrator , 1968 .

[2]  Masahiro Hirata,et al.  A bending and stretching mode crystal oscillator as a friction vacuum gauge , 1984 .

[3]  J. B. Starr.  Squeeze-film damping in solid-state accelerometers , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[4]  Toshifumi Ohkubo,et al.  Submicron Magnetizing andItsDetection Based onthePoint Magnetic Recording Concept , 1991 .

[5]  J. Fluitman,et al.  Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry , 1992 .

[6]  Some Characteristics of a Micro-Mechanical Resonator Integrated with Laser Diodes by AlGaAs/GaAs Micromachining. , 1993 .

[7]  Kunio Koyabu,et al.  Micro alignment machine for optical coupling , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[8]  H. Hosaka,et al.  Static rigidity and natural frequency of flat permalloy springs used in electromagnetic microactuators , 1993 .

[9]  Hiroshi Hosaka,et al.  Electromagnetic microrelays: Concepts and fundamental characteristics , 1994 .

[10]  R. Howe,et al.  Viscous damping model for laterally oscillating microstructures , 1994 .

[11]  Hiroshi Hosaka,et al.  Microdynamics of Vibrational Damping. , 1994 .

[12]  Shigehisa Fukui,et al.  Asymptotic Analysis of Ultra-Thin Gas Squeeze Film Lubrication for Infinitely Large Squeeze Number (Extension of Pan’s Theory to the Molecular Gas Film Lubrication Equation) , 1995 .