Analysis of the Errors Caused by Disturbed Multimode Fibers in the Interferometer with Fiber-Coupled Delivery

In this paper, the errors of the displacement measurement interferometer with multi-mode fiber-coupled delivery are analyzed when the fibers are disturbed. Simulation results show that the characteristic frequency of the measurement error is consistent with that of disturbance, and the error has higher order frequency components. The experiments are designed for the effect of fringe contrast on the measurement error. The experimental results show that the measurement error is rather sensitive to the interference angle between the measurement arm and the reference arm in the multi-mode fibers, but not to the irradiance ratio of the measurement arm and the reference arm. In an interferometer with multimode fiber, the interference angle between the measurement arm and the reference arm needs to be restricted. This conclusion provides a theoretical basis for designing an interferometer measurement system with interference angle that is adaptive to wider application.

[1]  Jonathan D. Ellis,et al.  Field guide to displacement measuring interferometry , 2014 .

[2]  J. Stone.  Stress-optic effects, birefringence, and reduction of birefringence by annealing in fiber Fabry-Perot interferometers , 1988 .

[3]  J. Broeng,et al.  Highly birefringent index-guiding photonic crystal fibers , 2001, IEEE Photonics Technology Letters.

[4]  H Han Haitjema,et al.  Fiber characterization for application in heterodyne laser interferometry, part II: modeling and analysis , 2005 .

[5]  S. Mumtaz,et al.  Reduction of Nonlinear Penalties Due to Linear Coupling in Multicore Optical Fibers , 2012, IEEE Photonics Technology Letters.

[6]  Ignacio Del Villar,et al.  Multimode-Coreless-Multimode Fiber-Based Sensors: Theoretical and Experimental Study , 2019, Journal of Lightwave Technology.

[7]  Ming Zhang,et al.  Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation , 2019, Sensors.

[8]  Tom Castenmiller,et al.  Towards ultimate optical lithography with NXT:1950i dual stage immersion platform , 2010, Advanced Lithography.

[9]  Wang Xuanze,et al.  Two-dimensional displacement sensing using a cross diffraction grating scheme , 2004 .

[10]  H Han Haitjema,et al.  Fiber characterization for application in heterodyne laser interferometry with nanometer uncertainty, part I: polarization state measurements , 2005 .

[11]  Francesco Poletti,et al.  Description of ultrashort pulse propagation in multimode optical fibers , 2008 .

[12]  M. Fermann,et al.  Single-mode excitation of multimode fibers with ultrashort pulses. , 1998, Optics letters.

[13]  Ming Zhang,et al.  Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner. , 2018, Optics express.

[14]  Jonathan D Ellis,et al.  Fiber-coupled displacement interferometry without periodic nonlinearity. , 2011, Optics letters.

[15]  M. Cada,et al.  Modal birefringence and power density distribution in strained buried-core square waveguides , 2004, IEEE Journal of Quantum Electronics.

[16]  Ming Zhang,et al.  Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range. , 2019, Applied optics.

[17]  Min Lan Jiang,et al.  Mini-Nano-Displacement Measurement with Double Diffraction Grating , 2011 .

[18]  Cheng-Chih Hsu,et al.  Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry. , 2017, Optics express.

[19]  G. P. Agrawal,et al.  Nonlinear performance of SDM systems designed with multimode or multicore fibers , 2013, 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC).

[20]  Libo Yuan,et al.  Optimization and experiment of a miniature multimode fiber induced-LPG refractometer , 2019, OSA Continuum.

[21]  Sun-Kyu Lee,et al.  Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review , 2013 .

[22]  L. Goldberg,et al.  Single-mode operation of a coiled multimode fiber amplifier. , 2000, Optics letters.

[23]  Jiubin Tan,et al.  Two-degree-of-freedom displacement measurement system based on double diffraction gratings , 2016 .

[24]  Dan Ding,et al.  Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision , 2018, Optical Engineering.

[25]  E. A. J. Marcatili,et al.  Multimode theory of graded-core fibers , 1973 .

[26]  Arjan J H Meskers,et al.  Validation of separated source frequency delivery for a fiber-coupled heterodyne displacement interferometer. , 2014, Optics letters.