Large area multilayered electrode arrays for dielectrophoretic fractionation

Abstract A technique is presented for the fabrication of large-area (20×20mm) multilayered electrode structures with 10μm feature size. This technique has been used in the fabrication of 1000-electrode arrays powered by a series of interconnected bus-bars with quadrature-phased AC power supplies. These electrodes generate a travelling electric field which induces an asynchronous electrostatic linear force - Travelling Wave Dielectrophoresis - which can propel particles of micron to submicron scale and can be used for fractionation of subpopulations of such particles according to their dielectric properties.