Compact single-pole six-throw switch using centre-anchor MEMS switches

A single-pole six-throw switch based on centre-anchor MEMS switches is presented. It has a chip size of 1 mm/sup 2/ and shows isolation of -48 dB and insertion loss of -0.5 dB between P1 and P4 at 6 GHz. Also, to evaluate the RF performance, the SP6T switch has been modelled using a structure-based /spl pi/ small-signal model.