论文信息 - The influence of post-etch InGaAs fin profile on electrical performance - 字舞流文

The influence of post-etch InGaAs fin profile on electrical performance

M. A. Pourghaderi | J. Geypen | H. Bender | A. Thean | N. Collaert | T. Ivanov | R. Arghavani | D. Lin | Y. Kimura | V. Vahedi | Samantha Tan | J. Marks | Jengyi Yu | D. Hellin | J. Vertommen | G. Kamarthy