Heterogeneously integrated long-wavelength VCSEL using silicon high contrast grating on an SOI substrate.

We report an electrically pumped hybrid cavity AlGaInAs-silicon long-wavelength VCSEL using a high contrast grating (HCG) reflector on a silicon-on-insulator (SOI) substrate. The VCSEL operates at silicon transparent wavelengths ~1.57 μm with >1 mW CW power outcoupled from the semiconductor DBR, and single-mode operation up to 65 °C. The thermal resistance of our device is measured to be 1.46 K/mW. We demonstrate >2.5 GHz 3-dB direct modulation bandwidth, and show error-free transmission over 2.5 km single mode fiber under 5 Gb/s direct modulation. We show a theoretical design of SOI-HCG serving both as a VCSEL reflector as well as waveguide coupler for an in-plane SOI waveguide, facilitating integration of VCSEL with in-plane silicon photonic circuits. The novel HCG-VCSEL design, which employs scalable flip-chip eutectic bonding, may enable low cost light sources for integrated optical links.

[1]  D. P. Worland,et al.  Long-Wavelength VCSEL Using High-Contrast Grating , 2013, IEEE Journal of Selected Topics in Quantum Electronics.

[2]  Alexei Sirbu,et al.  10-Gb/s and 10-km error-free transmission up to 100°C with 13-μm wavelength wafer-fused VCSELs , 2009 .

[3]  J. Goodman.  Optical interconnection for VLSI , 1984 .

[4]  Fumio Koyama,et al.  Recent advances in VCSEL photonics , 2006, 16th Opto-Electronics and Communications Conference.

[5]  Marek Osinski,et al.  Effective thermal conductivity analysis of 1.55 mu m InGaAsP/InP vertical-cavity top-surface-emitting microlasers , 1993 .

[6]  H. Izadpanah,et al.  Multigigabit/s operations of 16-wavelength vertical-cavity surface-emitting laser array , 1991, IEEE Photonics Technology Letters.

[7]  P. Westbergh,et al.  VCSEL Arrays for Multicore Fiber Interconnects With an Aggregate Capacity of 240 Gb/s , 2015, IEEE Photonics Technology Letters.

[8]  R. Baets,et al.  Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides , 2006 .

[9]  Chung-En Zah,et al.  Multiple wavelength tunable surface-emitting laser arrays , 1991 .

[10]  D. Miller,et al.  Optical interconnects to silicon , 2000, IEEE Journal of Selected Topics in Quantum Electronics.

[11]  Kazuhiro Ikeda,et al.  Room temperature operation of optically pumped 1.55-µm VCSEL with polarization-independent HCG mirror on SOI , 2013, 2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications.

[12]  J. Bowers,et al.  Electrically pumped hybrid AlGaInAs-silicon evanescent laser. , 2006, Optics express.

[13]  Li Zhu,et al.  Quality factor for high contrast grating resonators , 2012, IEEE Photonics Conference 2012.

[14]  C.J. Chang-Hasnain,et al.  Tunable VCSEL , 2000, IEEE Journal of Selected Topics in Quantum Electronics.

[15]  P. Wolf,et al.  1550-nm High-Speed Short-Cavity VCSELs , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[16]  D. Bordel,et al.  III-V-on-Si Photonic Crystal Vertical-Cavity Surface-Emitting Laser Arrays for Wavelength Division Multiplexing , 2013, IEEE Photonics Technology Letters.

[17]  Li Zhu,et al.  Novel high efficiency vertical to in-plane optical coupler , 2012, Other Conferences.

[18]  Salim Boutami,et al.  Compact and polarization controlled 1.55μm vertical-cavity surface-emitting laser using single-layer photonic crystal mirror , 2007 .

[19]  Alexei Sirbu,et al.  Long-wavelength VCSELs: Power-efficient answer , 2009 .

[20]  C. Chang-Hasnain,et al.  High contrast gratings for integrated optoelectronics , 2010, 2010 IEEE Photinic Society's 23rd Annual Meeting.

[21]  Ming C. Wu,et al.  Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration , 2015 .

[22]  Takafumi Yao,et al.  Thermal properties of AlAs/GaAs superlattices , 1987 .

[23]  S. J. B. Yoo,et al.  Thermal comparison of long-wavelength vertical-cavity surface-emitting laser diodes , 1994 .

[24]  Alex Mutig,et al.  Progress on High-Speed 980 nm VCSELs for Short-Reach Optical Interconnects , 2011 .

[25]  F.J. Leonberger,et al.  Optical interconnections for VLSI systems , 1984, Proceedings of the IEEE.

[26]  Wlodzimierz Nakwaski,et al.  Thermal conductivity of binary, ternary, and quaternary III‐V compounds , 1988 .

[27]  C. Caneau,et al.  Long-Wavelength Vertical-Cavity Surface-Emitting Lasers on InP With Lattice Matched AlGaInAs–InP DBR Grown by MOCVD , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[28]  Ye Zhou,et al.  Size effect of high contrast gratings in VCSELs. , 2009, Optics express.