论文信息 - Deriving Feature Fail Rate from Silicon Volume Diagnostics Data

Deriving Feature Fail Rate from Silicon Volume Diagnostics Data

In this paper, we propose expanding the use of volume diagnostics to go beyond the identification of critical features to accurately estimate their FFRs. We present a case study where FFRs of a few critical features are identified using volume diagnostics. We also compare FFRs calculated from volume diagnostics to those extracted for the same feature on test structures, which validates our presented approach.

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