论文信息 - Preferential crystal orientation etching of GaN nanopillars in Cl2 plasma - 字舞流文

Preferential crystal orientation etching of GaN nanopillars in Cl2 plasma

E. Pargon | C. Petit-Etienne | S. Labau | S. R. Sales de Mello | L. Jaloustre | Valentin Ackermann | S. Sales De Mello