Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation
暂无分享,去创建一个
M. Okandan | F.L. Degertekin | K. Peterson | B. Bicen | C.T. Garcia | F. Degertekin | N. Hall | G. Keeler | M. Okandan | D. Serkland | K. Peterson | R. Littrell | D.K. Serkland | N.A. Hall | R. Littrell | G.A. Keeler | B. Bicen | C. García
[1] Murat Okandan,et al. Micromachined microphones with diffraction-based optical displacement detection , 2005 .
[2] F.L. Degertekin,et al. Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[3] A. A. Allerman,et al. Monolithic integration of vertical-cavity surface-emitting lasers and wavelength-shifted resonant-cavity photodetectors , 2001, LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242).
[4] Scott R. Manalis,et al. Sub-10 cm/sup 3/ interferometric accelerometer with nano-g resolution , 2002 .
[5] B. Boser,et al. Surface micromachined accelerometers , 1995, Proceedings of the IEEE 1995 Custom Integrated Circuits Conference.
[6] F. Degertekin,et al. A new atomic force microscope probe with force sensing integrated readout and active tip , 2006 .
[7] Stephen F. Bart,et al. An integrated force-balanced capacitive accelerometer for low-g applications , 1996 .
[8] Victor R. Yarberry. Meeting the MEMS “Design-to-Analysis” Challenge: The SUMMiT , 2002 .
[9] F.L. Degertekin,et al. Fabrication and characterization of a micromachined acoustic sensor with integrated optical readout , 2004, IEEE Journal of Selected Topics in Quantum Electronics.
[10] Todd Sulchek,et al. High-speed tapping mode imaging with active Q control for atomic force microscopy , 2000 .
[11] Jerome Mertz,et al. Regulation of a microcantilever response by force feedback , 1993 .
[12] Stephen F. Bart,et al. An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[13] Y. Nemirovsky,et al. Characterization of a novel micromachined accelerometer with enhanced-MIDOS , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[14] T. Gabrielson. Mechanical-thermal noise in micromachined acoustic and vibration sensors , 1993 .
[15] Joseph L. Garbini,et al. Optimal control of ultrasoft cantilevers for force microscopy , 1998 .
[16] A. Partridge,et al. Encapsulated submillimeter piezoresistive accelerometers , 2006, Journal of Microelectromechanical Systems.
[17] W. Bachtold,et al. Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays , 2000, IEEE Photonics Technology Letters.
[18] Thomas W. Kenny,et al. A high-precision, wide-bandwidth micromachined tunneling accelerometer , 2001 .
[19] Farrokh Ayazi,et al. Wafer-level MEMS packaging via thermally released metal-organic membranes , 2006 .
[20] Martin A. Schmidt,et al. Sub-10 cm 3 Interferometric Accelerometer With Nanog Resolution , 2001 .
[21] K. Najafi,et al. Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging , 1998, Journal of Microelectromechanical Systems.