Effect of the substrate on RF power-handling capability of micro-electromechanical capacitive switches

RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysics finite-element analysis. Coupled electromechanical, electrothermal and thermomechanical models were constructed by using commercially available software. Simulations by using the models were validated by small- and large-signal RF measurements. The measurements showed that the power-handling capacity of the switches depended on not only the properties of the membrane (the movable part of the switches), but also the substrate properties and the circuit environment. These effects were captured in a compacted model, which could be used to guide the improvement of the power-handling capacity of the switches.

[1]  Gabriel M. Rebeiz,et al.  Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[2]  James C. M. Hwang,et al.  Robust RF MEMS switches and phase shifters for aerospace applications , 2009, 2009 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT).

[3]  C. Goldsmith,et al.  Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes , 2009, IEEE Transactions on Microwave Theory and Techniques.

[4]  Paola Farinelli,et al.  A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications , 2007 .

[5]  Yoshitake Nishi,et al.  Temperature dependence of electrical resistivity for gold and lead , 1987 .

[6]  Gabriel M. Rebeiz,et al.  Performance of temperature-stable RF MEMS switched capacitors under high RF power conditions , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[7]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[8]  Roberto Sorrentino,et al.  Effect of substrate on temperature range and power capacity of RF MEMS capacitive switches , 2010, The 40th European Microwave Conference.

[9]  J. Herd,et al.  Advanced architecture for a low cost Multifunction Phased Array Radar , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[10]  Jan Mehner,et al.  Investigations of rf shunt airbridge switches among different environmental conditions , 2004 .

[11]  J. Iannacci,et al.  Evolution of electrical parameters of dielectric-less ohmic RF-MEMS switches during continuous actuation stress , 2009, 2009 Proceedings of the European Solid State Device Research Conference.

[12]  D. Peroulis,et al.  RF MEMS switches with enhanced power-handling capabilities , 2004, IEEE Transactions on Microwave Theory and Techniques.