Micro-Motion Machine and Micro-Element Fabricating Machine Using 3 Degree of Freedom Parallel Mechanism

The present invention relates to a three-degree-of-freedom micro-fine component and whole-processing machine using a parallel mechanism. Fine exercise equipment according to the invention, Prisma tick flexible joints in rebeol root two arms connected by a flexible joint and, Prisma tick flexible the joint of one of the arm connected to the universal flexible joint in connection with the universal flexible joint and the platform , by the Prisma tick flexible joint is in each vertical direction can move up and down, 3 degrees of freedom it is possible to exercise. According to the micro-exercise equipment according to the present invention, but the structure is relatively simple compared to conventional parallel mechanism large in rigidity, was inertia is small, while low cost and has high accuracy and high mobility. By applying a parallel mechanism for fine exercise equipment having such properties in fine parts processing machine, and employing one of the processes such as a suitable cutting, electrical discharge machining, laser machining for the machining of micro parts the 3 DOF tool part or to a parallel mechanism platform by placing the material table, along with the advantages of a parallel mechanism, a relatively large working space, it is possible to design a fine machine parts having a further advantage to processing a three-dimensional fine parts of various shapes.