论文信息 - GaAs membrane supported millimeter-wave receiver structures

GaAs membrane supported millimeter-wave receiver structures

In this paper, we describe the design, manufacturing and characterization of a monolithically integrated micromachined millimeter-wave receiver module. The antenna array, the matching network, and the GaAs Schottky diode are supported on a thin GaAs membrane. The receiver structure benefits from the advantages of the membrane supported transmission lines as well as of the Schottky diode integration on the membrane. The 2.2 μm thin GaAs membranes were grown by molecular beam epitaxy and formed by reactive ion etching employing selective etch-stop techniques. The results from the measurements of the voltage sensitivity and the radiation pattern of the 38 GHz receiver demonstrated state-of-the-art performance of the micromachined structure fabricated with our process.

[1] Giancarlo Bartolucci,et al. Polyimide based GaAs micromachined millimeter wave structures , 2000 .

[2] Linda P. B. Katehi,et al. Development of self-packaged high frequency circuits using micromachining techniques , 1995 .

[3] I. Mehdi,et al. 200, 400 and 800 GHz Schottky diode "substrateless" multipliers: design and results , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[4] I. Mehdi,et al. Fabrication of 200 to 2700 GHz multiplier devices using GaAs and metal membranes , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[5] Peter H. Siegel,et al. 2.5 THz GaAs Monolithic Membrane-Diode Mixer A New Planar Circut Realization for High Frequency Semiconductor Components , 1998 .

[6] Gabriel M. Rebeiz,et al. A 90-100 GHz double-folded slot antenna , 1999 .

[7] Gabriel M. Rebeiz,et al. A uniplanar 90-GHz Schottky-diode millimeter-wave receiver , 1995 .

[8] Gabriel M. Rebeiz,et al. Micromachined W-band filters , 1996 .

[9] Chen-Yu Chi,et al. Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques , 1995 .

[10] Pierre Blondy,et al. Micromachined filters for 38 and 77 GHz supported on thin membranes , 2001 .

[11] Gabriel M. Rebeiz,et al. Low loss micromachined filters for millimeter-wave telecommunication systems , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).