Design and simulation of Nano-diamond film pressure sensor

Abstract Nano-graphite was mixed in Nano-diamond powder and cellulose or other organic vehicles to fabricate paste for screen-printed film. Through special thermal-sintering technique and post-treatment process, Nano-diamond emission tip was sharp and distributed uniformly over the surface. A pressure sensor based on Nano-diamond film was designed and simulated. According to Fowelr Nordheim equation, the physics model was established. Under the fixed voltage U which arrived field emission, an additional force d F acted the anode metal of sensor resulted in the micro-deformation decreasing d S between anode cathode, the E increased refer to formula E  =  U / S , and resulted in the emission current density's micro-deformation increasing d J . The differ-mold scale magnifying circuit magnified the interacted information. Result of MATLAB simulation indicated that the change of d J /d S with d F /d S was linear. The result satisfied the stability requirement of sensor.