论文信息 - Plasma techniques in the production of customized MEMS‐applications - 字舞流文

Plasma techniques in the production of customized MEMS‐applications

Dave D. Hochstein | A. Bittner | J. Dehnert | A. Dehe | Dave D Hochstein | Jan Rockstroh | F. Hedrich | S. Billat | A. Dehé