论文信息 - Reduced dislocation density and residual tension in AlN grown on SiC by metalorganic chemical vapor deposition - 字舞流文

Reduced dislocation density and residual tension in AlN grown on SiC by metalorganic chemical vapor deposition

S. Denbaars | S. Nakamura | J. Speck | Yifan Yao | M. Iza | Feng Wu | Burhan K. Saifaddin | Abdullah S. Almogbel | C. Zollner