The influence of the pulse length on the drilling of metals with an excimer laser

Laser parameters, which significantly influence laser-material interaction processes, are the wavelength, the energy, and the power density. Additionally, there are parameters, like the pulse length, which also strongly influence processing speed and quality. Studies where different types of lasers have been used indicate that long pulses are beneficial for processing speed. However, when different types of laser systems are used to study the effect of the pulse length, a direct comparison of the results is difficult because the use of different lasers involves a simultaneous variation of other parameters (e.g., wavelength) as well. In this study a technique of pulse length variation is used in which the pulse length is the only varied parameter and thus enables the desired direct comparison. Pulses with different lengths are sliced out of pulses of a long pulse XeCl excimer laser, keeping all other laser parameters unchanged. Results are shown of hole drilling experiments in 125 μm nickel, 25 μm aluminum...