论文信息 - Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen - 字舞流文

Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen

K. Zakrzewska | A. Trenczek-Zając | M. Radecka | S. Bourgeois | L. Imhoff | M. C. M. D. Lucas | A. Brudnik | E. Kusior