暂无分享,去创建一个
Justine Philippe | Flavie Braud | Etienne Okada | Christophe Gaquiere | Emmanuel Dubois | Daniel Gloria | Vanessa Avramovic | Jean-Franccois Robillard | C'edric Durand | Arun Bhaskar
[1] Brent C. Stuart,et al. Ultrashort-pulse laser machining of dielectric materials , 1999 .
[2] M. Stuke,et al. Sub-picosecond UV laser ablation of metals , 1995 .
[3] Minoru Obara,et al. Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser , 1999 .
[4] E. Dubois,et al. Application-oriented performance of RF CMOS technologies on flexible substrates , 2015, 2015 IEEE International Electron Devices Meeting (IEDM).
[6] Ph. Delaporte,et al. Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication , 2008 .
[7] Wolfgang Kautek,et al. Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials , 1994 .
[8] Eric Audouard,et al. Optimization of surface engraving quality with ultrafast lasers , 2017 .
[9] Matthias Domke,et al. Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses , 2015, Photonics West - Lasers and Applications in Science and Engineering.
[10] Ik-Bu Sohn,et al. Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining , 2009 .
[11] A. Aberle,et al. Analysis of nanosecond and femtosecond laser ablation of rear dielectrics of silicon wafer solar cells , 2019, Solar Energy Materials and Solar Cells.
[12] Eric Mazur,et al. Silicon Surface Morphologies after Femtosecond Laser Irradiation , 2006 .
[13] Harold K. Haugen,et al. Femtosecond laser micromachining of grooves in silicon with 800 nm pulses , 2005 .
[14] B. Jaeggi,et al. Optimization of the volume ablation rate for metals at different laser pulse-durations from ps to fs , 2012, LASE.
[15] David Ashkenasi,et al. Laser processing of sapphire with picosecond and sub-picosecond pulses , 1997 .
[16] Costas Fotakis,et al. Making silicon hydrophobic: wettability control by two-lengthscale simultaneous patterning with femtosecond laser irradiation , 2006, Nanotechnology.
[17] Lawrence Shah,et al. Femtosecond laser machining of multi-depth microchannel networks onto silicon , 2011 .
[18] M. Domke,et al. Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles , 2018, Advanced Optical Technologies.
[19] Rusli,et al. Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate , 2014 .
[20] S. Nikumb,et al. Femtosecond laser micromilling of Si wafers , 2008 .
[21] M. Shaheen,et al. Femtosecond laser ablation behavior of gold, crystalline silicon, and fused silica: a comparative study , 2014 .
[22] Qing Yang,et al. Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser. , 2013, ACS applied materials & interfaces.
[23] A. Gillner,et al. Dicing of Thin Si Wafers with a Picosecond Laser Ablation Process , 2013 .
[24] E. Dubois,et al. Thermal Analysis of Ultimately-Thinned-and-Transfer-Bonded CMOS on Mechanically Flexible Foils , 2019, IEEE Journal of the Electron Devices Society.
[25] Ya Cheng,et al. Large area uniform nanostructures fabricated by direct femtosecond laser ablation. , 2008, Optics express.
[26] W. Kautek,et al. Femtosecond laser ablation of silicon–modification thresholds and morphology , 2002 .
[27] Emmanuel Dubois,et al. Radio-frequency and low noise characteristics of SOI technology on plastic for flexible electronics , 2013 .
[28] Ruediger Grunwald,et al. Femtosecond laser-induced periodic surface structures revisited: A comparative study on ZnO , 2009 .
[29] J. Liu. Simple technique for measurements of pulsed Gaussian-beam spot sizes. , 1982, Optics letters.
[30] Stable superhydrophobic surface with hierarchical mesh-porous structure fabricated by a femtosecond laser , 2013 .
[31] Wolfgang Kautek,et al. Spot size and pulse number dependence of femtosecond laser ablation thresholds of silicon and stainless steel , 2017 .
[32] Emmanuel Dubois,et al. A converging route towards very high frequency, mechanically flexible, and performance stable integrated electronics , 2013 .
[33] M. Sentis,et al. Wavelength scaling of silicon laser ablation in picosecond regime , 2017 .
[34] Harold K. Haugen,et al. Femtosecond laser micromachining of grooves in indium phosphide , 2004 .
[35] Bo Tan,et al. A femtosecond laser-induced periodical surface structure on crystalline silicon , 2006 .
[36] E. Dubois,et al. High frequency noise potentialities of reported CMOS 65 nm SOI technology on flexible substrate , 2012, 2012 IEEE 12th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.
[37] Arun Bhaskar,et al. Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applications , 2019, LASE.
[38] P. A. Atanasov,et al. Ablation of metals by ultrashort laser pulses , 2004 .
[39] M. Domke,et al. Ultrashort pulse laser dicing of thin Si wafers: the influence of laser-induced periodic surface structures on the backside breaking strength , 2016 .
[40] Sandrine Ricaud,et al. Comparison of picosecond and femtosecond laser ablation for surface engraving of metals and semiconductors , 2012, LASE.
[41] Mool C. Gupta,et al. Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation , 2010 .
[42] M. Sentis,et al. Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation , 2017 .
[43] E. Dubois,et al. 150-GHz RF SOI-CMOS Technology in Ultrathin Regime on Organic Substrate , 2011, IEEE Electron Device Letters.
[44] Qihong Wu,et al. Femtosecond laser-induced periodic surface structure on diamond film , 2003 .
[45] M. Cather Simpson,et al. Effects of dopant type and concentration on the femtosecond laser ablation threshold and incubation behaviour of silicon , 2016, 1611.05333.
[46] Andreas Ostendorf,et al. Ablation and cutting of planar silicon devices using femtosecond laser pulses , 2003 .
[47] Christophe Maleville. Engineered substrates for Moore and more than Moore's law: Device scaling: Entering the substrate era , 2015, 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).