スムーズインパクト駆動機構(SIDM)の開発

The piezoelectric element has high positioning resolution although it suffers from the problem of a rather small displacement range. The proposed actuator can achieve both a high positioning resolution and a long stroke. This mechanism is modified the construction of Impact Drive Mechanism (IDM), and is named Smooth Impact Drive Mechanism (SIDM) because of the smooth movement. SIDM is com-posed of 3 parts, which are moving body placed on the base with little friction, piezoelectric element and friction part placed on the base with a certain friction. SIDM has coarse and precise driving modes. In coarse driving modes, saw-tooth voltage is applied to the piezoelectric element, and the movig body is moved in a long stroke with slip because of the inertia and the friction of the moving body. In precise driving modes, a slowly changed voltage is applied to the piezoelectric element, the main body is moved with the movement of the piezo itself without slip. An experimental translation stage incorporat-ing the SIDM has been built to evaluate the performance of the SIDM.